Yoon
Lee
Sponsored
By: LMA Affiliates
Abstract
In
a CMP process, abrasive particles play a key role in the mechanical
portion of the material removal process. Since the material removal
process due to the slurry particles is mostly a 3 body free abrasive
process, the interaction between the particle and the workpiece at different
contact geometry will have a different influence on the material removal
processes. In this research, this geometric effect between the particle
and the workpiece is examined at various different conditions to provide
optimized parameters for different process requirements.
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