Investigation of the Relationship between Preston’s Coefficient and Friction Coefficient in Chemical Mechanical Polishing (CMP) 

 Yongsik Moon  

Sponsored By: NSF / UC-SMART 

Abstract 

In this research, the relationship between Preston’s coefficient and friction coefficient in chemical mechanical polishing (CMP) is investigated and a basic mathematical model of the polishing process, Preston’s wear equation, is modified.  

 

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