Nikhil Krishnan
Sponsored
By: Applied Materials, NSF/SRC
Abstract
The
complex process sequences carried out in a modern semiconductor fabrication facility impede effective
environmental decision making. Additionally, environmental issues are intertwined with cost, productivity
and performance factors. A decision and design support tool can enlighten environmental decision-making
and facilitate environmentally benign process and equipment design and selection. The Environmental
Value Systems (EnV-S) Analysis (Figure 1) is a design tool under development, to evaluate cost,
performance and ESH impacts of semiconductor manufacturing process sequences through an aggregated
analysis of individual system components. In the past year of work, the approach behind the EnV-S has
been detailed and the EnV-S is used to inform system selection decisions for copper Chemical Mechanical
Planarization (CMP) effluent treatment and water recycling systems.
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