The Effects of Abrasive Size Distribution in Chemical- Mechanical Polishing: Modeling and Verification  

  Jianfeng Luo 

Sponsored By: UC SMART/NSF 

Abstract 

The abrasive size distribution plays an important role in the material removal in CMP. Basically, they influence the material removal from two aspects, one the number of active abrasives, and the other the size of the active abrasives. In this report, a model with material removal rate formulation explaining the effects of abrasive size distribution on the CMP material removal has been proposed and verified.  

 

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