Jianfeng Luo
Sponsored
By: UC SMART/NSF;
Abstract
Controlling/designing the consumable parameters is a possible way to optimize the non-uniformity in CMP, and may
be a better choice than the conventional method of adding dummy structures with the decrease of the feature size in ICs
and higher requirements on the circuit performance. In this report, the motivation for improving NU by adjusting
consumable parameters are discussed. Details on this report can be found in J. Luo and D. A. Dornfeld, "Improvement
of NU in CMP from the viewpoint of consumable effects based on a developed material removal model," ESRC
reports, UC Berkeley, 2000.
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