Nikhil
Krishnan and Uday Ayyagari
Sponsored
By: NSF/SRC and Applied Materials
Abstract
Corporations
are becoming increasingly aware of environmental issues related to human
industrial activity. Some corporations are making efforts to proactively
improve their environmental performance from a systems perspective.
Manufacturing is frequently an area of significant environmental impacts.
However, proactive environmental improvements in manufacturing industries
are confounded by rapid growth, fast-changing technologies and large
and complex manufacturing systems. Furthermore, systematically reducing
the environmental impacts of manufacturing processes requires parallel
knowledge of environmental, health, performance and cost factors to
identify win-win scenarios. These challenges are especially evident
in semiconductor manufacturing. The Environmental Value Systems (EnV-S)
Analysis was developed to inform environmental design and decision making
in semiconductor manufacturing. To successfully incorporate environmental,
cost and performance factors in a decision tool, however, requires the
integration of fundamental physical-chemical modeling. This paper describes
a generic framework for such integration, using a case study in Chemical
Mechanical Polishing (CMP).
Keywords:
chemical mechanical polishing, decision making, environmental impact,
semiconductor manufacturing
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