Micromilling for Mold Fabrication

Christian R. Keppeler
Sponsored by LMA

Abstract- A method for manufacturing a new type of CMP pad is presented. The goal is to create a mold containing micro sized features that can be used in vacuum casting to produce the polymeric polishing pads. To achieve this, a positive mold is cut from PMMA using micro milling techniques. An opposite mold is then created by electroplating nickel onto the mold and separating the metal from the polymer.

Keywords: chemical mechanical polishing (CMP), micro milling, micro mold fabrication.

 

 

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