MEMS Applications of CMP

Edward Hwang
Sponsored by UC SMART

Abstract- In order to keep pace with tight designs for MEMS, CMP has started to be adopted. In this report, some MEMS devices fabricated with CMP are shown, and some possible areas in which CMP can make contribution to are suggested.

Keywords: CMP, MEMS, SUMMiT, and multi-level structures.

 

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