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2002 LMA Research Report Index

Download all 2002 Research Reports PDF

Miguel C. Avila
Alexander Balduhn

Model of a Burr Expert System
Sponsored by: CODEF

Jihong Choi and
Sangkee Min

Modeling of Inter-Layer Gap Formation in Drilling of a Multi-Layered Material
Sponsored by: CODEF

Kiha Lee

Micro-Burr Formation and Minimization through Process Control
Sponsored by: CODEF

Prabhu
Ramachandran

Feasible Offset Region Based Tool Path Planning for Face Milling
Sponsored by: CODEF

Arvind Rangarajan

Probabilistic Precision Process Planning- P4
Sponsored by: CODEF

White Paper on Technical Software Integration
Sponsored by: CODEF

Determining Statistically Significant Parameter Regions for Bounded Specification
Sponsored by: CODEF


Uday Ayyagari , Nikhil Krishnan and Joaquin Rosales
Peter Broomes
Nikhil Krishnan and
Uday Ayyagari


Edward Hwang
MEMS Applications of CMP
Sponsored by: UC SMART
 
Christian R. Keppeler
Sunghoon Lee A Study on Pad Surface Characterization and Design for Chemical Mechanical Polishing (CMP)-Fabrication Process and Prototype
Sponsored by UC SMART
Jianfeng Luo

Review of Chemical-Mechanical Planarization Modeling for Integrated Circuit Fabrication: From Particle Scale to Die and Wafer Scales
Sponsored by NSF and UC-SMART

  Wafer-Scale CMP Modeling of With-in Wafer Non-Uniformity
Sponsored by NSF and UC SMART
C.M.O. Valente Using Graphical Analysis of Acoustic Emission
Sponsored by Industry Affiliates of the LMA

 

 

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