Solid State Evergreen Post-CMP Cleaner

Description:

The SSEC Post-CMP Cleaner was installed in the UC Berkeley Microfabrication Facilities in 1999. The cleaner is equipped with multi-stage scrubbers and chemical cleaning capabilities. It has an automated wafer handling system to process upto 25 wafers per run.

Location:

190 Cory Hall (UC Berkeley Microfabrication Facilities)

Qualified LMA Users:

Inkil (Edward) Hwang

 

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